Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6478936 | Anode assembly for plating and planarizing a conductive layer | Rimma Volodarsky, Konstantin Volodarsky, Cyprian Emeka Uzoh, Homayoun Talieh | 2002-11-12 |
| 6468139 | Polishing apparatus and method with a refreshing polishing belt and loadable housing | Homayoun Talieh, Konstantin Volodarsky, Jalal Ashjaee | 2002-10-22 |
| 6464571 | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein | Homayoun Talieh, Konstantin Volodarsky, Jalal Ashjaee | 2002-10-15 |
| 6425812 | Polishing head for chemical mechanical polishing using linear planarization technology | Anil K. Pant, Glenn W. Travis, Konstantin Volodarsky, Andrew J. Nagengast | 2002-07-30 |
| 6359264 | Thermal cycling module | Charles D. Schaper, Hooman Bolandi | 2002-03-19 |
| 6352623 | Vertically configured chamber used for multiple processes | Konstantin Volodarsky, Boguslaw Nagorski, Rimma Volodarsky, Cyprian Emeka Uzoh, Homayoun Talieh | 2002-03-05 |