Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6425812 | Polishing head for chemical mechanical polishing using linear planarization technology | Anil K. Pant, Douglas W. Young, Glenn W. Travis, Konstantin Volodarsky | 2002-07-30 |