Issued Patents 2002
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6497800 | Device providing electrical contact to the surface of a semiconductor workpiece during metal plating | Cyprian Emeka Uzoh, Bulent M. Basol | 2002-12-24 |
| 6482307 | Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing | Jalal Ashjaee, Boguslaw Nagorski, Bulent M. Basol, Cyprian Emeka Uzoh | 2002-11-19 |
| 6478936 | Anode assembly for plating and planarizing a conductive layer | Rimma Volodarsky, Konstantin Volodarsky, Cyprian Emeka Uzoh, Douglas W. Young | 2002-11-12 |
| 6471847 | Method for forming an electrical contact with a semiconductor substrate | Bulent M. Basol | 2002-10-29 |
| 6468139 | Polishing apparatus and method with a refreshing polishing belt and loadable housing | Konstantin Volodarsky, Jalal Ashjaee, Douglas W. Young | 2002-10-22 |
| 6464571 | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein | Konstantin Volodarsky, Jalal Ashjaee, Douglas W. Young | 2002-10-15 |
| 6413403 | Method and apparatus employing pad designs and structures with improved fluid distribution | Paul Lindquist, Bulent M. Basol, Cyprian Emeka Uzoh | 2002-07-02 |
| 6413388 | Pad designs and structures for a versatile materials processing apparatus | Cyprian Emeka Uzoh, Bulent M. Basol | 2002-07-02 |
| 6409904 | Method and apparatus for depositing and controlling the texture of a thin film | Cyprian Emeka Uzoh | 2002-06-25 |
| 6402925 | Method and apparatus for electrochemical mechanical deposition | — | 2002-06-11 |
| 6398625 | Apparatus and method of polishing with slurry delivery through a polishing pad | — | 2002-06-04 |
| 6355153 | Chip interconnect and packaging deposition methods and structures | Cyprian Emeka Uzoh, Bulent M. Basol | 2002-03-12 |
| 6354916 | Modified plating solution for plating and planarization and process utilizing same | Cyprian Emeka Uzoh, Bulent M. Basol | 2002-03-12 |
| 6352623 | Vertically configured chamber used for multiple processes | Konstantin Volodarsky, Boguslaw Nagorski, Rimma Volodarsky, Douglas W. Young, Cyprian Emeka Uzoh | 2002-03-05 |