Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6482307 | Method of and apparatus for making electrical contact to wafer surface for full-face electroplating or electropolishing | Boguslaw Nagorski, Bulent M. Basol, Homayoun Talieh, Cyprian Emeka Uzoh | 2002-11-19 |
| 6468139 | Polishing apparatus and method with a refreshing polishing belt and loadable housing | Homayoun Talieh, Konstantin Volodarsky, Douglas W. Young | 2002-10-22 |
| 6464571 | Polishing apparatus and method with belt drive system adapted to extend the lifetime of a refreshing polishing belt provided therein | Homayoun Talieh, Konstantin Volodarsky, Douglas W. Young | 2002-10-15 |