Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475293 | Rotating belt wafer edge cleaning apparatus | Monsour Moinpour, Ilan Berman | 2002-11-05 |
| 6357071 | Rotating belt wafer edge cleaning apparatus | Monsour Moinpour, Ilan Berman | 2002-03-19 |
| 6334229 | Apparatus for cleaning edges of contaminated substrates | Mansour Moinpour, Hoang T. Nguyen, Mohsen Salek, Tom Bramblett, John deLarios +3 more | 2002-01-01 |