Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495470 | Contact and via fabrication technologies | S. M. Reza Sadjadi, Te Hua Lin, Farhad Moghadam | 2002-12-17 |
| 6365521 | Passivation for tight metal geometry | Jan V. Shubert, Glen Wada, Yang-Chin Shih, Ken Schatz | 2002-04-02 |
| 6334229 | Apparatus for cleaning edges of contaminated substrates | Hoang T. Nguyen, Mohsen Salek, Young C. Park, Tom Bramblett, John deLarios +3 more | 2002-01-01 |