Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6488040 | Capillary proximity heads for single wafer cleaning and drying | John M. de Larios, Glen Travis, Jim Keller, Wilbur C. Krusell | 2002-12-03 |
| 6435952 | Apparatus and method for qualifying a chemical mechanical planarization process | John M. Boyd, Katrina Mikhaylich | 2002-08-20 |
| 6375540 | End-point detection system for chemical mechanical posing applications | Katrina Mikhaylich, Yehiel Gotkis | 2002-04-23 |
| 6361414 | Apparatus and method for conditioning a fixed abrasive polishing pad in a chemical mechanical planarization process | Katrina Mikhaylich, Don E. Anderson | 2002-03-26 |