Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6495464 | Method and apparatus for fixed abrasive substrate preparation and use in a cluster CMP tool | Michael S. Lacy | 2002-12-17 |
| 6488568 | Optical view port for chemical mechanical planarization endpoint detection | Randolph Treur, Stephan Wolf | 2002-12-03 |
| 6475332 | Interlocking chemical mechanical polishing system | Katgenahalli Y. Ramanujam, Sridharan Srivatsan, Xuyen Pham | 2002-11-05 |
| 6471566 | Sacrificial retaining ring CMP system and methods for implementing the same | Katrina Mikhaylich | 2002-10-29 |
| 6435952 | Apparatus and method for qualifying a chemical mechanical planarization process | Katrina Mikhaylich, Mike Ravkin | 2002-08-20 |
| 6358118 | Field controlled polishing apparatus and method | Robert G. Boehm, Jr. | 2002-03-19 |