Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6475332 | Interlocking chemical mechanical polishing system | John M. Boyd, Katgenahalli Y. Ramanujam, Sridharan Srivatsan | 2002-11-05 |
| 6447380 | Polishing apparatus and substrate retainer ring providing continuous slurry distribution | Joe Simon | 2002-09-10 |