Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6471566 | Sacrificial retaining ring CMP system and methods for implementing the same | John M. Boyd | 2002-10-29 |
| 6435952 | Apparatus and method for qualifying a chemical mechanical planarization process | John M. Boyd, Mike Ravkin | 2002-08-20 |
| 6431959 | System and method of defect optimization for chemical mechanical planarization of polysilicon | Michael Ravkin | 2002-08-13 |
| 6375540 | End-point detection system for chemical mechanical posing applications | Mike Ravkin, Yehiel Gotkis | 2002-04-23 |
| 6361414 | Apparatus and method for conditioning a fixed abrasive polishing pad in a chemical mechanical planarization process | Mike Ravkin, Don E. Anderson | 2002-03-26 |
| 6352595 | Method and system for cleaning a chemical mechanical polishing pad | Julia Svirchevski | 2002-03-05 |