Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6439245 | Method for transferring wafers from a conveyor system to a wafer processing station | Brian Bliven | 2002-08-27 |
| 6431959 | System and method of defect optimization for chemical mechanical planarization of polysilicon | Katrina Mikhaylich | 2002-08-13 |
| 6425158 | Apparatus for processing a wafer | — | 2002-07-30 |