Issued Patents 2002
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6361414 | Apparatus and method for conditioning a fixed abrasive polishing pad in a chemical mechanical planarization process | Mike Ravkin, Katrina Mikhaylich | 2002-03-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6361414 | Apparatus and method for conditioning a fixed abrasive polishing pad in a chemical mechanical planarization process | Mike Ravkin, Katrina Mikhaylich | 2002-03-26 |