Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6468134 | Method and apparatus for slurry distribution | — | 2002-10-22 |
| 6454637 | Edge instability suppressing device and system | — | 2002-09-24 |
| 6386962 | Wafer carrier with groove for decoupling retainer ring from water | Aleksander Owczarz | 2002-05-14 |
| 6375540 | End-point detection system for chemical mechanical posing applications | Katrina Mikhaylich, Mike Ravkin | 2002-04-23 |
| 6340326 | System and method for controlled polishing and planarization of semiconductor wafers | Rod Kistler | 2002-01-22 |