Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6408863 | Seal configuration for use with a motor drive assembly in a microelectronic work piece processing system | — | 2002-06-25 |
| 6386962 | Wafer carrier with groove for decoupling retainer ring from water | Yehiel Gotkis | 2002-05-14 |