Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6405399 | Method and system of cleaning a wafer after chemical mechanical polishing or plasma processing | Jeffrey Farber | 2002-06-18 |
| 6352595 | Method and system for cleaning a chemical mechanical polishing pad | Katrina Mikhaylich | 2002-03-05 |