Issued Patents 2002
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443820 | Polishing apparatus | — | 2002-09-03 |
| 6443821 | Workpiece carrier and polishing apparatus having workpiece carrier | Hozumi Yasuda | 2002-09-03 |
| 6439980 | Workpiece carrier and polishing apparatus having workpiece carrier | — | 2002-08-27 |
| 6432258 | Apparatus for and method of polishing workpiece | Hozumi Yasuda | 2002-08-13 |
| 6428403 | Polishing apparatus | Hozumi Yasuda | 2002-08-06 |
| 6416384 | Method and apparatus for polishing | Takayoshi Kawamoto, Hozumi Yasuda, Hiroshi Yoshida | 2002-07-09 |
| 6413357 | Polishing apparatus | Tetsuji Togawa, Seiji Katsuoka, Toyomi Nishi | 2002-07-02 |
| 6413156 | Method and apparatus for polishing workpiece | Noburu Shimizu | 2002-07-02 |
| 6406364 | Polishing solution feeder | Hirokuni Hiyama, Yutaka Wada, Kiyotaka Kawashima, Manabu Tsujimura, Takayoshi Kawamoto | 2002-06-18 |
| 6364752 | Method and apparatus for dressing polishing cloth | You Ishii, Toyomi Nishi, Takayoshi Kawamoto, Takeshi Sakurai | 2002-04-02 |
| 6354907 | Polishing apparatus including attitude controller for turntable and/or wafer carrier | Ichiju Satoh, Katsuya Okumura | 2002-03-12 |
| 6350346 | Apparatus for polishing workpiece | Masamichi Nakashiba, Isamu Watanabe, Yoko Hasegawa | 2002-02-26 |
| 6343978 | Method and apparatus for polishing workpiece | Noburu Shimizu | 2002-02-05 |