Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6435949 | Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof | Hozumi Yasuda, Tadakazu Sone, Shunichiro Kojima, Manabu Tsujimura | 2002-08-20 |
| 6413146 | Polishing apparatus | Manabu Tsujimura, Kunihiko Sakurai, Hiroyuki Osawa | 2002-07-02 |
| 6413357 | Polishing apparatus | Tetsuji Togawa, Norio Kimura, Toyomi Nishi | 2002-07-02 |
| 6402597 | Polishing apparatus and method | Kunihiko Sakurai | 2002-06-11 |
| 6354918 | Apparatus and method for polishing workpiece | Tetsuji Togawa, Nobuyuki Takada, Kenichi Shigeta | 2002-03-12 |