Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500051 | Polishing apparatus and method | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Hiromi Yajima, Kazuaki Himukai +7 more | 2002-12-31 |
| 6443808 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Katsuya Okumura, Riichirou Aoki, Hiromi Yajima, Seiji Ishikawa | 2002-09-03 |
| 6439971 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Katsuya Okumura, Riichirou Aoki, Hiromi Yajima, Seiji Ishikawa | 2002-08-27 |
| 6435949 | Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof | Seiji Katsuoka, Hozumi Yasuda, Tadakazu Sone, Shunichiro Kojima | 2002-08-20 |
| 6425806 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Katsuya Okumura, Riichirou Aoki, Hiromi Yajima, Seiji Ishikawa | 2002-07-30 |
| 6413146 | Polishing apparatus | Seiji Katsuoka, Kunihiko Sakurai, Hiroyuki Osawa | 2002-07-02 |
| 6406364 | Polishing solution feeder | Norio Kimura, Hirokuni Hiyama, Yutaka Wada, Kiyotaka Kawashima, Takayoshi Kawamoto | 2002-06-18 |