Issued Patents 2002
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443808 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Katsuya Okumura, Hiromi Yajima, Seiji Ishikawa, Manabu Tsujimura | 2002-09-03 |
| 6439971 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Katsuya Okumura, Hiromi Yajima, Seiji Ishikawa, Manabu Tsujimura | 2002-08-27 |
| 6425806 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Katsuya Okumura, Hiromi Yajima, Seiji Ishikawa, Manabu Tsujimura | 2002-07-30 |