Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500051 | Polishing apparatus and method | Toyomi Nishi, Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Kazuaki Himukai +7 more | 2002-12-31 |
| 6443808 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Katsuya Okumura, Riichirou Aoki, Seiji Ishikawa, Manabu Tsujimura | 2002-09-03 |
| 6439971 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Katsuya Okumura, Riichirou Aoki, Seiji Ishikawa, Manabu Tsujimura | 2002-08-27 |
| 6425806 | Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor device | Katsuya Okumura, Riichirou Aoki, Seiji Ishikawa, Manabu Tsujimura | 2002-07-30 |
| 6413154 | Polishing apparatus | Tetsuji Togawa, Takeshi Sakurai, Nobuyuki Takada, Shoichi Kodama | 2002-07-02 |