Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6413154 | Polishing apparatus | Tetsuji Togawa, Nobuyuki Takada, Shoichi Kodama, Hiromi Yajima | 2002-07-02 |
| 6364752 | Method and apparatus for dressing polishing cloth | Norio Kimura, You Ishii, Toyomi Nishi, Takayoshi Kawamoto | 2002-04-02 |