Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6447385 | Polishing apparatus | Tetsuji Togawa | 2002-09-10 |
| 6413154 | Polishing apparatus | Tetsuji Togawa, Takeshi Sakurai, Shoichi Kodama, Hiromi Yajima | 2002-07-02 |
| 6379229 | Polishing apparatus | Satoshi Wakabayashi, Tetsuji Togawa, Kuniaki Yamaguchi | 2002-04-30 |
| 6358128 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2002-03-19 |
| 6354918 | Apparatus and method for polishing workpiece | Tetsuji Togawa, Seiji Katsuoka, Kenichi Shigeta | 2002-03-12 |
| 6354922 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Satoshi Wakabayashi, Kenichiro Saito, Masahiko Sekimoto +2 more | 2002-03-12 |