Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6428400 | Drainage structure in polishing plant | Tetsuji Togawa | 2002-08-06 |
| 6409582 | Polishing apparatus | Tetsuji Togawa, Shunichiro Kojima, Toyomi Nishi | 2002-06-25 |
| 6379229 | Polishing apparatus | Satoshi Wakabayashi, Tetsuji Togawa, Nobuyuki Takada | 2002-04-30 |
| 6338669 | Polishing device | Tetsuji Togawa | 2002-01-15 |