Issued Patents 2002
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6390901 | Polishing apparatus | Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo, Tetsuji Togawa | 2002-05-21 |
| 6379229 | Polishing apparatus | Tetsuji Togawa, Nobuyuki Takada, Kuniaki Yamaguchi | 2002-04-30 |
| 6358126 | Polishing apparatus | Robert R. Jackson, Tetsuji Togawa | 2002-03-19 |
| 6358128 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Nobuyuki Takada, Kenichiro Saito, Masahiko Sekimoto +2 more | 2002-03-19 |
| 6358131 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa | 2002-03-19 |
| 6354922 | Polishing apparatus | Kunihiko Sakurai, Tetsuji Togawa, Nobuyuki Takada, Kenichiro Saito, Masahiko Sekimoto +2 more | 2002-03-12 |