Issued Patents 2002
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458012 | Polishing apparatus | Kazuto Hirokawa, Hirokuni Hiyama, Yutaka Wada, Tetsuji Togawa | 2002-10-01 |
| 6413149 | Abrading plate and polishing method using the same | Yutaka Wada, Hirokuni Hiyama, Kazuto Hirokawa | 2002-07-02 |
| 6413155 | Polishing apparatus | Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa | 2002-07-02 |
| 6402588 | Polishing apparatus | Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa | 2002-06-11 |
| 6398626 | Polishing apparatus | Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa, Tetsuji Togawa | 2002-06-04 |
| 6390901 | Polishing apparatus | Hirokuni Hiyama, Yutaka Wada, Kazuto Hirokawa, Tetsuji Togawa, Satoshi Wakabayashi | 2002-05-21 |
| 6336850 | Slurry dispenser and polishing apparatus | Yutaka Wada, Hirokuni Hiyama, Kazuto Hirokawa | 2002-01-08 |