Issued Patents 2002
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6458012 | Polishing apparatus | Kazuto Hirokawa, Yutaka Wada, Hisanori Matsuo, Tetsuji Togawa | 2002-10-01 |
| 6454644 | Polisher and method for manufacturing same and polishing tool | Hisamitsu Miyazaki, Yutaka Wada | 2002-09-24 |
| 6413149 | Abrading plate and polishing method using the same | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo | 2002-07-02 |
| 6413155 | Polishing apparatus | Hisanori Matsuo, Yutaka Wada, Kazuto Hirokawa | 2002-07-02 |
| 6406364 | Polishing solution feeder | Norio Kimura, Yutaka Wada, Kiyotaka Kawashima, Manabu Tsujimura, Takayoshi Kawamoto | 2002-06-18 |
| 6402588 | Polishing apparatus | Hisanori Matsuo, Yutaka Wada, Kazuto Hirokawa | 2002-06-11 |
| 6398626 | Polishing apparatus | Hisanori Matsuo, Yutaka Wada, Kazuto Hirokawa, Tetsuji Togawa | 2002-06-04 |
| 6390901 | Polishing apparatus | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo, Tetsuji Togawa, Satoshi Wakabayashi | 2002-05-21 |
| 6336850 | Slurry dispenser and polishing apparatus | Yutaka Wada, Kazuto Hirokawa, Hisanori Matsuo | 2002-01-08 |