YW

Yutaka Wada

EB Ebara: 9 patents #3 of 266Top 2%
📍 Rifu, JP: #4 of 223 inventorsTop 2%
Overall (2002): #1,863 of 266,432Top 1%
9
Patents 2002

Issued Patents 2002

Showing 1–9 of 9 patents

Patent #TitleCo-InventorsDate
6458012 Polishing apparatus Kazuto Hirokawa, Hirokuni Hiyama, Hisanori Matsuo, Tetsuji Togawa 2002-10-01
6454644 Polisher and method for manufacturing same and polishing tool Hisamitsu Miyazaki, Hirokuni Hiyama 2002-09-24
6413149 Abrading plate and polishing method using the same Hirokuni Hiyama, Kazuto Hirokawa, Hisanori Matsuo 2002-07-02
6413155 Polishing apparatus Hisanori Matsuo, Hirokuni Hiyama, Kazuto Hirokawa 2002-07-02
6406364 Polishing solution feeder Norio Kimura, Hirokuni Hiyama, Kiyotaka Kawashima, Manabu Tsujimura, Takayoshi Kawamoto 2002-06-18
6402588 Polishing apparatus Hisanori Matsuo, Hirokuni Hiyama, Kazuto Hirokawa 2002-06-11
6398626 Polishing apparatus Hisanori Matsuo, Hirokuni Hiyama, Kazuto Hirokawa, Tetsuji Togawa 2002-06-04
6390901 Polishing apparatus Hirokuni Hiyama, Kazuto Hirokawa, Hisanori Matsuo, Tetsuji Togawa, Satoshi Wakabayashi 2002-05-21
6336850 Slurry dispenser and polishing apparatus Hirokuni Hiyama, Kazuto Hirokawa, Hisanori Matsuo 2002-01-08