Issued Patents 2002
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6500051 | Polishing apparatus and method | Tetsuji Togawa, Harumitsu Saito, Manabu Tsujimura, Hiromi Yajima, Kazuaki Himukai +7 more | 2002-12-31 |
| 6413357 | Polishing apparatus | Tetsuji Togawa, Seiji Katsuoka, Norio Kimura | 2002-07-02 |
| 6409582 | Polishing apparatus | Tetsuji Togawa, Kuniaki Yamaguchi, Shunichiro Kojima | 2002-06-25 |
| 6364752 | Method and apparatus for dressing polishing cloth | Norio Kimura, You Ishii, Takayoshi Kawamoto, Takeshi Sakurai | 2002-04-02 |