Issued Patents 2002
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6443821 | Workpiece carrier and polishing apparatus having workpiece carrier | Norio Kimura | 2002-09-03 |
| 6435949 | Workpiece polishing apparatus comprising a fluid pressure bag provided between a pressing surface and the workpiece and method of use thereof | Seiji Katsuoka, Tadakazu Sone, Shunichiro Kojima, Manabu Tsujimura | 2002-08-20 |
| 6432258 | Apparatus for and method of polishing workpiece | Norio Kimura | 2002-08-13 |
| 6428403 | Polishing apparatus | Norio Kimura | 2002-08-06 |
| 6416384 | Method and apparatus for polishing | Takayoshi Kawamoto, Norio Kimura, Hiroshi Yoshida | 2002-07-09 |