Issued Patents 2002
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6437864 | Stage positioning device | Katsuhide Watanabe, Takahide Haga, Yoshinori Jouno | 2002-08-20 |
| 6354907 | Polishing apparatus including attitude controller for turntable and/or wafer carrier | Norio Kimura, Katsuya Okumura | 2002-03-12 |