Issued Patents 1994
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376211 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Isahiro Hasegawa +3 more | 1994-12-27 |
| 5356515 | Dry etching method | Yoshifumi Tahara, Yoshihisa Hirano, Masahiro Ogasawara, Isahiro Hasegawa, Takaya Matsushita | 1994-10-18 |
| 5320704 | Plasma etching apparatus | Yukimasa Yoshida, Shiro Koyama | 1994-06-14 |
| 5310454 | Dry etching method | Tokuhisa Ohiwa, Hisataka Hayashi, Haruo Okano, Takaya Matsushita, Isahiro Hasegawa +1 more | 1994-05-10 |
| 5302240 | Method of manufacturing semiconductor device | Masaru Hori, Hiroyuki Yano, Hisataka Hayashi, Sadayuki Jimbo, Haruo Okano +3 more | 1994-04-12 |
| 5302236 | Method of etching object to be processed including oxide or nitride portion | Yoshifumi Tahara, Yoshihisa Hirano, Isahiro Hasegawa | 1994-04-12 |
| 5298112 | Method for removing composite attached to material by dry etching | Nobuo Hayasaka, Tsunetoshi Arikado, Haruo Okano | 1994-03-29 |
| 5290381 | Plasma etching apparatus | Toshihisa Nozawa, Junichi Arami, Isahiro Hasegawa | 1994-03-01 |