Issued Patents 1994
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376211 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Hiromi Kumagai, Junichi Arami, Keiji Horioka, Isahiro Hasegawa +3 more | 1994-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376211 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Hiromi Kumagai, Junichi Arami, Keiji Horioka, Isahiro Hasegawa +3 more | 1994-12-27 |