Issued Patents 1994
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376211 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka +3 more | 1994-12-27 |
| 5356515 | Dry etching method | Yoshifumi Tahara, Yoshihisa Hirano, Masahiro Ogasawara, Keiji Horioka, Takaya Matsushita | 1994-10-18 |
| 5310454 | Dry etching method | Tokuhisa Ohiwa, Hisataka Hayashi, Keiji Horioka, Haruo Okano, Takaya Matsushita +1 more | 1994-05-10 |
| 5302236 | Method of etching object to be processed including oxide or nitride portion | Yoshifumi Tahara, Yoshihisa Hirano, Keiji Horioka | 1994-04-12 |
| 5290381 | Plasma etching apparatus | Toshihisa Nozawa, Junichi Arami, Keiji Horioka | 1994-03-01 |
| 5289152 | Permanent magnet magnetic circuit | Masami Oguriyama, Yoshio Ishigaki, Haruo Okano, Jun-ichi Arami, Hiromi Harada | 1994-02-22 |