Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376211 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Keiji Horioka, Isahiro Hasegawa +3 more | 1994-12-27 |
| 5290381 | Plasma etching apparatus | Toshihisa Nozawa, Keiji Horioka, Isahiro Hasegawa | 1994-03-01 |
| 5275683 | Mount for supporting substrates and plasma processing apparatus using the same | Kazuo Fukasawa, Takashi Ito | 1994-01-04 |