Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5342471 | Plasma processing apparatus including condensation preventing means | Masachika Suetsugu | 1994-08-30 |
| 5310453 | Plasma process method using an electrostatic chuck | Ryo Nonaka, Kousuke Imafuku | 1994-05-10 |
| 5275683 | Mount for supporting substrates and plasma processing apparatus using the same | Junichi Arami, Takashi Ito | 1994-01-04 |