Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356515 | Dry etching method | Yoshihisa Hirano, Masahiro Ogasawara, Isahiro Hasegawa, Keiji Horioka, Takaya Matsushita | 1994-10-18 |
| 5302236 | Method of etching object to be processed including oxide or nitride portion | Yoshihisa Hirano, Isahiro Hasegawa, Keiji Horioka | 1994-04-12 |