Issued Patents 1994
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5356515 | Dry etching method | Yoshifumi Tahara, Yoshihisa Hirano, Masahiro Ogasawara, Isahiro Hasegawa, Keiji Horioka | 1994-10-18 |
| 5310454 | Dry etching method | Tokuhisa Ohiwa, Hisataka Hayashi, Keiji Horioka, Haruo Okano, Isahiro Hasegawa +1 more | 1994-05-10 |