Issued Patents 1994
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376211 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka +3 more | 1994-12-27 |
| 5312519 | Method of cleaning a charged beam apparatus | Itsuko Sakai, Nobuo Hayasaka | 1994-05-17 |
| 5310454 | Dry etching method | Tokuhisa Ohiwa, Hisataka Hayashi, Keiji Horioka, Takaya Matsushita, Isahiro Hasegawa +1 more | 1994-05-10 |
| 5304510 | Method of manufacturing a multilayered metallization structure in which the conductive layer and insulating layer are selectively deposited | Kyoichi Suguro | 1994-04-19 |
| 5302240 | Method of manufacturing semiconductor device | Masaru Hori, Hiroyuki Yano, Keiji Horioka, Hisataka Hayashi, Sadayuki Jimbo +3 more | 1994-04-12 |
| 5298112 | Method for removing composite attached to material by dry etching | Nobuo Hayasaka, Tsunetoshi Arikado, Keiji Horioka | 1994-03-29 |
| 5290733 | Method of manufacturing semiconductor devices including depositing aluminum on aluminum leads | Nobuo Hayasaka, Ayako Shimazaki | 1994-03-01 |
| 5289152 | Permanent magnet magnetic circuit | Masami Oguriyama, Yoshio Ishigaki, Isahiro Hasegawa, Jun-ichi Arami, Hiromi Harada | 1994-02-22 |