Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5312519 | Method of cleaning a charged beam apparatus | Itsuko Sakai, Haruo Okano | 1994-05-17 |
| 5298112 | Method for removing composite attached to material by dry etching | Tsunetoshi Arikado, Haruo Okano, Keiji Horioka | 1994-03-29 |
| 5290733 | Method of manufacturing semiconductor devices including depositing aluminum on aluminum leads | Ayako Shimazaki, Haruo Okano | 1994-03-01 |