Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376211 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka +3 more | 1994-12-27 |
| 5320704 | Plasma etching apparatus | Keiji Horioka, Shiro Koyama | 1994-06-14 |
| 5286978 | Method of removing electric charge accumulated on a semiconductor substrate in ion implantation | Katsuya Okumura | 1994-02-15 |