Issued Patents 1994
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5376211 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Junichi Arami, Keiji Horioka +3 more | 1994-12-27 |
| 5370371 | Heat treatment apparatus | Katsushin Miyagi, Shingo Watanabe, Yuuichi Mikata | 1994-12-06 |
| 5368062 | Gas supplying system and gas supplying apparatus | Yoshihisa Sudo, Kenichi Goshima, Hiroshi Itafuji, Akihiro Kojima | 1994-11-29 |
| 5362968 | Optic column having particular major/minor axis magnification ratio | Motosuke Miyoshi, Yuichiro Yamazaki | 1994-11-08 |
| 5356834 | Method of forming contact windows in semiconductor devices | Shigeki Sugimoto | 1994-10-18 |
| 5354710 | Method of manufacturing semiconductor devices using an adsorption enhancement layer | Hideichi Kawaguchi, Yoshitaka Tsunashima, Kikuo Yamabe | 1994-10-11 |
| 5328078 | Connection method and connection device for electrical connection of small portions | — | 1994-07-12 |
| 5315119 | Electron beam irradiating apparatus and electric signal detecting apparatus | Fumio Komatsu, Motosuke Miyoshi | 1994-05-24 |
| 5314847 | Semiconductor substrate surface processing method using combustion flame | Tohru Watanabe | 1994-05-24 |
| 5302548 | Semiconductor device manufacturing method | Tohru Watanabe | 1994-04-12 |
| 5297956 | Method and apparatus for heat treating | Kikuo Yamabe, Keitaro Imai, Ken Nakao, Seikou Ueno | 1994-03-29 |
| 5293045 | Electrostatic lens | Motosuke Miyoshi, Yuichiro Yamazaki | 1994-03-08 |
| 5286978 | Method of removing electric charge accumulated on a semiconductor substrate in ion implantation | Yukimasa Yoshida | 1994-02-15 |
| 5279614 | Stain preventive treatment process for polyamide fiber | Juji Uchida, Masayuki Maeno | 1994-01-18 |
| 5278104 | Semiconductor wafer carrier having a dust cover | Masako Kodera, Tohru Watanabe | 1994-01-11 |