Issued Patents 1994
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5359197 | Apparatus and method of aligning electron beam of scanning electron microscope | Motosuke Miyoshi | 1994-10-25 |
| 5315119 | Electron beam irradiating apparatus and electric signal detecting apparatus | Katsuya Okumura, Motosuke Miyoshi | 1994-05-24 |
| 5302829 | Automatic focusing method for scanning electron microscopy | Yasuhiro Kaga | 1994-04-12 |