Issued Patents All Time
Showing 126–139 of 139 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7579602 | Ion implantation with a collimator magnet and a neutral filter magnet | Victor M. Benveniste, Christopher Campbell | 2009-08-25 |
| 6429139 | Serial wafer handling mechanism | Kevin T. Ryan, Peter L. Kellerman, Ernest E. Allen, Roger B. Fish | 2002-08-06 |
| 6414329 | Method and system for microwave excitation of plasma in an ion beam guide | Victor M. Benveniste, William F. DiVergilio | 2002-07-02 |
| 6347919 | Wafer processing chamber having separable upper and lower halves | Kevin T. Ryan, Peter L. Kellerman, Ernest E. Allen, Roger B. Fish | 2002-02-19 |
| 6213184 | Seam welder | — | 2001-04-10 |
| 5865942 | Seam welder | — | 1999-02-02 |
| 5814819 | System and method for neutralizing an ion beam using water vapor | Victor M. Benveniste, Jiong Chen | 1998-09-29 |
| 5760409 | Dose control for use in an ion implanter | Hank H. Chen, Michiro Sugitani | 1998-06-02 |
| 5670217 | Method for capturing and removing contaminant particles from an interior region of an ion implanter | Julian G. Blake, Robert Becker, David J. Chipman, Mary Jones, Lyudmila Menn +1 more | 1997-09-23 |
| 5656092 | Apparatus for capturing and removing contaminant particles from an interior region of an ion implanter | Julian G. Blake, Robert Becker, David J. Chipman, Mary Jones, Lyudmila Menn +1 more | 1997-08-12 |
| 5608223 | Ion implantation device | Suguru Hirokawa | 1997-03-04 |
| 5525807 | Ion implantation device | Suguru Hirokawa, Neil Demario | 1996-06-11 |
| 5156741 | Wastewater treatment system and method | Dean N. Morrison, Marvin Daniels, G. S. Tiwari | 1992-10-20 |
| D294362 | Hot air discharge tip for membrane seam welder | — | 1988-02-23 |