Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9023720 | Manufacturing method of semiconductor device | Genshu Fuse | 2015-05-05 |
| 8163635 | Manufacturing method of semiconductor device | Genshu Fuse | 2012-04-24 |
| 7597531 | Method of controlling mover device | Keiji Okada, Yoshitomo Hidaka, Junichi Murakami, Fumiaki Sato, Mitsukuni Tsukihara +2 more | 2009-10-06 |
| 7315034 | Irradiation system with ion beam/charged particle beam | Takanori Yagita, Takashi Nishi, Junichi Murakami, Mitsukuni Tsukihara, Mitsuaki Kabasawa +2 more | 2008-01-01 |
| 7304319 | Wafer charge compensation device and ion implantation system having the same | Hiroshi Kawaguchi, Makoto Sano, Junichi Murakami, Mitsukuni Tsukihara, Mitsuaki Kabasawa +3 more | 2007-12-04 |
| 7187143 | Mover device and semiconductor manufacturing apparatus and method | Keiji Okada, Yoshitomo Hidaka, Junichi Murakami, Fumiaki Sato, Mitsukuni Tsukihara +2 more | 2007-03-06 |
| 6984833 | Ion implanter and method for controlling the same | Makoto Sano, Mitsuaki Kabasawa, Mitsukuni Tsukihara | 2006-01-10 |
| 6815697 | Ion beam charge neutralizer and method therefor | Makoto Sano | 2004-11-09 |
| 6797968 | Ion beam processing method and apparatus therefor | Mitsukuni Tsukihara, Yoshitaka Amano, Mitsuaki Kabasawa, Hiroki Murooka, Hiroshi Matsushita | 2004-09-28 |
| 6794661 | Ion implantation apparatus capable of increasing beam current | Mitsukuni Tsukihara, Mitsuaki Kabasawa, Hiroki Murooka, Hiroshi Matsushita | 2004-09-21 |
| 6635889 | Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof | Mitsukuni Tsukihara, Mitsuaki Kabasawa, Yuji Takahashi | 2003-10-21 |
| 6573517 | Ion implantation apparatus | Mitsukuni Tsukihara, Yoshitomo Hidaka, Mitsuaki Kabasawa, Kouji Inada | 2003-06-03 |
| 6242747 | Method and system for optimizing linac operational parameters | Hiroyuki Kariya, Mitsukuni Tsukihara, Kenji Sawada | 2001-06-05 |
| 6194734 | Method and system for operating a variable aperture in an ion implanter | Paul A. Loomis, Hans J. Rutishauser, Jun Lu, Toru Murakami, Hiroshi Sogabe | 2001-02-27 |
| 5760409 | Dose control for use in an ion implanter | Hank H. Chen, Frank Sinclair | 1998-06-02 |