Issued Patents All Time
Showing 1–25 of 26 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502210 | Ion implanter, ion implantation method, and beam measurement apparatus | Makoto Sano, Haruka Sasaki, Kouji Inada | 2016-11-22 |
| 9449791 | Beam irradiation apparatus and beam irradiation method | Noriyasu Ido, Noriyuki Suetsugu | 2016-09-20 |
| 9208996 | Ion implantation apparatus and ion implantation method | Mitsuaki Kabasawa | 2015-12-08 |
| 8759801 | Ion implantation apparatus and ion implantation method | Shiro Ninomiya, Tetsuya Kudo, Tatsuya Yamada | 2014-06-24 |
| 7982192 | Beam processing apparatus | Mitsuaki Kabasawa, Hiroshi Matsushita, Takanori Yagita, Yoshitaka Amano, Yoshito Fujii | 2011-07-19 |
| 7851772 | Ion implantation apparatus and ion implantation method | Takanori Yagita, Hiroshi Sogabe, Toshio Yumiyama, Mitsuaki Kabasawa | 2010-12-14 |
| 7791049 | Ion implantation apparatus | Yoshito Fujii | 2010-09-07 |
| 7755067 | Ion implantation apparatus and method of converging/shaping ion beam used therefor | Takanori Yagita, Yoshitaka Amano, Mitsuaki Kabasawa | 2010-07-13 |
| 7718980 | Beam processing system and beam processing method | Mitsuaki Kabasawa | 2010-05-18 |
| 7687782 | Electrostatic beam deflection scanner and beam deflection scanning method | Mitsuaki Kabasawa, Yoshitaka Amano, Hiroshi Matsushita | 2010-03-30 |
| 7597531 | Method of controlling mover device | Keiji Okada, Michiro Sugitani, Yoshitomo Hidaka, Junichi Murakami, Fumiaki Sato +2 more | 2009-10-06 |
| 7429743 | Irradiation system ion beam and method to enhance accuracy of irradiation | Mitsuaki Kabasawa | 2008-09-30 |
| 7411709 | Beam processing system and beam processing method | Takanori Yagita, Hisaki Izutani, Takashi Kuroda | 2008-08-12 |
| 7361892 | Method to increase low-energy beam current in irradiation system with ion beam | Mitsuaki Kabasawa | 2008-04-22 |
| 7351987 | Irradiation system with ion beam | Mitsuaki Kabasawa, Hiroshi Sogabe | 2008-04-01 |
| 7315034 | Irradiation system with ion beam/charged particle beam | Takanori Yagita, Takashi Nishi, Michiro Sugitani, Junichi Murakami, Mitsuaki Kabasawa +2 more | 2008-01-01 |
| 7304319 | Wafer charge compensation device and ion implantation system having the same | Hiroshi Kawaguchi, Makoto Sano, Michiro Sugitani, Junichi Murakami, Mitsuaki Kabasawa +3 more | 2007-12-04 |
| 7276711 | Beam space-charge compensation device and ion implantation system having the same | Hiroshi Kawaguchi, Takanori Yagita, Takashi Nishi, Junichi Murakami, Mitsuaki Kabasawa | 2007-10-02 |
| 7187143 | Mover device and semiconductor manufacturing apparatus and method | Keiji Okada, Yoshitomo Hidaka, Michiro Sugitani, Junichi Murakami, Fumiaki Sato +2 more | 2007-03-06 |
| 7138641 | Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system | Hiroshi Matsushita, Mitsuaki Kabasawa, Yoshitaka Amano, Yasuhiko Kimura, Junichi Murakami | 2006-11-21 |
| 6984833 | Ion implanter and method for controlling the same | Makoto Sano, Michiro Sugitani, Mitsuaki Kabasawa | 2006-01-10 |
| 6797968 | Ion beam processing method and apparatus therefor | Yoshitaka Amano, Mitsuaki Kabasawa, Michiro Sugitani, Hiroki Murooka, Hiroshi Matsushita | 2004-09-28 |
| 6794661 | Ion implantation apparatus capable of increasing beam current | Mitsuaki Kabasawa, Michiro Sugitani, Hiroki Murooka, Hiroshi Matsushita | 2004-09-21 |
| 6635889 | Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof | Mitsuaki Kabasawa, Yuji Takahashi, Michiro Sugitani | 2003-10-21 |
| 6573517 | Ion implantation apparatus | Michiro Sugitani, Yoshitomo Hidaka, Mitsuaki Kabasawa, Kouji Inada | 2003-06-03 |