Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10217607 | Ion implantation apparatus and ion implantation method | Kazuhisa Ishibashi, Shiro Ninomiya, Akihiro Ochi | 2019-02-26 |
| 9564289 | Ion implanter and method of controlling the same | Tadanobu Kagawa, Takeshi Kurose | 2017-02-07 |
| 9379030 | Ion implantation method and ion implantation apparatus | Shiro Ninomiya, Tadanobu Kagawa, Akira Funai, Takashi Kuroda | 2016-06-28 |
| 9305784 | Ion implantation method and ion implantation apparatus | Shiro Ninomiya, Yasuharu Okamoto, Akihiro Ochi | 2016-04-05 |
| 8772741 | Ion implantation method and ion implantation apparatus | Shiro Ninomiya, Akihiro Ochi, Yasuhiko Kimura, Yasuharu Okamoto | 2014-07-08 |
| 8735855 | Ion beam irradiation system and ion beam irradiation method | Shiro Ninomiya, Yasuhiko Kimura, Tetsuya Kudo, Akihiro Ochi | 2014-05-27 |
| 8692216 | Ion implantation apparatus and control method thereof | Hiroyuki Kariya, Masaki Ishikawa, Yoshiaki Inda, Takeshi Kurose, Takanori Yagita | 2014-04-08 |
| 7851772 | Ion implantation apparatus and ion implantation method | Mitsukuni Tsukihara, Takanori Yagita, Hiroshi Sogabe, Mitsuaki Kabasawa | 2010-12-14 |