Issued Patents All Time
Showing 1–17 of 17 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11699569 | Ion implanter and particle detection method | Aki Ninomiya, Takao Morita, Sayumi Hirose | 2023-07-11 |
| 11017978 | Ion implanter and beam park device | — | 2021-05-25 |
| 9520265 | Ion implantation apparatus | — | 2016-12-13 |
| 9431214 | Ion implantation apparatus | Hiroshi Matsushita, Mitsuaki Kabasawa, Yoshitaka Amano | 2016-08-30 |
| 9343262 | Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method | Mitsuaki Kabasawa, Haruka Sasaki | 2016-05-17 |
| 9293295 | Ion implantation apparatus, final energy filter, and ion implantation method | — | 2016-03-22 |
| 9236222 | Ion implantation apparatus and ion implantation method | Mitsuaki Kabasawa | 2016-01-12 |
| 9208991 | Ion implantation apparatus | Hiroshi Matsushita, Mitsuaki Kabasawa, Yoshitaka Amano | 2015-12-08 |
| 9117627 | Ion implantation apparatus and ion implantation method | Kazuhisa Manabe | 2015-08-25 |
| 8692216 | Ion implantation apparatus and control method thereof | Hiroyuki Kariya, Masaki Ishikawa, Yoshiaki Inda, Takeshi Kurose, Toshio Yumiyama | 2014-04-08 |
| 7982192 | Beam processing apparatus | Mitsukuni Tsukihara, Mitsuaki Kabasawa, Hiroshi Matsushita, Yoshitaka Amano, Yoshito Fujii | 2011-07-19 |
| 7851772 | Ion implantation apparatus and ion implantation method | Mitsukuni Tsukihara, Hiroshi Sogabe, Toshio Yumiyama, Mitsuaki Kabasawa | 2010-12-14 |
| 7755067 | Ion implantation apparatus and method of converging/shaping ion beam used therefor | Mitsukuni Tsukihara, Yoshitaka Amano, Mitsuaki Kabasawa | 2010-07-13 |
| 7423276 | Irradiation system with ion beam/charged particle beam | — | 2008-09-09 |
| 7411709 | Beam processing system and beam processing method | Hisaki Izutani, Mitsukuni Tsukihara, Takashi Kuroda | 2008-08-12 |
| 7315034 | Irradiation system with ion beam/charged particle beam | Takashi Nishi, Michiro Sugitani, Junichi Murakami, Mitsukuni Tsukihara, Mitsuaki Kabasawa +2 more | 2008-01-01 |
| 7276711 | Beam space-charge compensation device and ion implantation system having the same | Hiroshi Kawaguchi, Takashi Nishi, Junichi Murakami, Mitsukuni Tsukihara, Mitsuaki Kabasawa | 2007-10-02 |