Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790117 | Ion implantation apparatus and measurement device | — | 2020-09-29 |
| 8692216 | Ion implantation apparatus and control method thereof | Hiroyuki Kariya, Masaki Ishikawa, Takeshi Kurose, Takanori Yagita, Toshio Yumiyama | 2014-04-08 |