Issued Patents All Time
Showing 1–25 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9466467 | Ion implantation apparatus | Kazuhiro Watanabe, Hitoshi Ando, Kouji Inada, Tatsuya Yamada | 2016-10-11 |
| 9431214 | Ion implantation apparatus | Hiroshi Matsushita, Yoshitaka Amano, Takanori Yagita | 2016-08-30 |
| 9390890 | High-energy ion implanter | Kazuhiro Watanabe, Haruka Sasaki, Kouji Inada | 2016-07-12 |
| 9384944 | Ion implanter and ion implantation method | Masaki Ishikawa, Yusuke Ueno | 2016-07-05 |
| 9368327 | High-energy ion implanter | Tatsuo Nishihara, Kazuhiro Watanabe, Yuuji Takahashi, Tatsuya Yamada | 2016-06-14 |
| 9355847 | High-energy ion implanter | Kazuhiro Watanabe, Haruka Sasaki, Kouji Inada, Makoto Sano | 2016-05-31 |
| 9343262 | Ion implantation apparatus, beam parallelizing apparatus, and ion implantation method | Takanori Yagita, Haruka Sasaki | 2016-05-17 |
| 9236222 | Ion implantation apparatus and ion implantation method | Takanori Yagita | 2016-01-12 |
| 9208991 | Ion implantation apparatus | Hiroshi Matsushita, Yoshitaka Amano, Takanori Yagita | 2015-12-08 |
| 9208996 | Ion implantation apparatus and ion implantation method | Mitsukuni Tsukihara | 2015-12-08 |
| 8987690 | High-energy ion implanter | Kazuhiro Watanabe, Haruka Sasaki, Kouji Kato, Hitoshi Ando | 2015-03-24 |
| 8952340 | High-frequency acceleration type ion acceleration and transportation apparatus having high energy precision | Tatsuo Nishihara, Kazuhiro Watanabe, Yuuji Takahashi, Tatsuya Yamada | 2015-02-10 |
| 7982192 | Beam processing apparatus | Mitsukuni Tsukihara, Hiroshi Matsushita, Takanori Yagita, Yoshitaka Amano, Yoshito Fujii | 2011-07-19 |
| 7851772 | Ion implantation apparatus and ion implantation method | Mitsukuni Tsukihara, Takanori Yagita, Hiroshi Sogabe, Toshio Yumiyama | 2010-12-14 |
| 7755067 | Ion implantation apparatus and method of converging/shaping ion beam used therefor | Mitsukuni Tsukihara, Takanori Yagita, Yoshitaka Amano | 2010-07-13 |
| 7718980 | Beam processing system and beam processing method | Mitsukuni Tsukihara | 2010-05-18 |
| 7687782 | Electrostatic beam deflection scanner and beam deflection scanning method | Mitsukuni Tsukihara, Yoshitaka Amano, Hiroshi Matsushita | 2010-03-30 |
| 7429743 | Irradiation system ion beam and method to enhance accuracy of irradiation | Mitsukuni Tsukihara | 2008-09-30 |
| 7361892 | Method to increase low-energy beam current in irradiation system with ion beam | Mitsukuni Tsukihara | 2008-04-22 |
| 7351987 | Irradiation system with ion beam | Mitsukuni Tsukihara, Hiroshi Sogabe | 2008-04-01 |
| 7315034 | Irradiation system with ion beam/charged particle beam | Takanori Yagita, Takashi Nishi, Michiro Sugitani, Junichi Murakami, Mitsukuni Tsukihara +2 more | 2008-01-01 |
| 7304319 | Wafer charge compensation device and ion implantation system having the same | Hiroshi Kawaguchi, Makoto Sano, Michiro Sugitani, Junichi Murakami, Mitsukuni Tsukihara +3 more | 2007-12-04 |
| 7276711 | Beam space-charge compensation device and ion implantation system having the same | Hiroshi Kawaguchi, Takanori Yagita, Takashi Nishi, Junichi Murakami, Mitsukuni Tsukihara | 2007-10-02 |
| 7138641 | Beam deflecting method, beam deflector for scanning, ion implantation method, and ion implantation system | Hiroshi Matsushita, Yoshitaka Amano, Yasuhiko Kimura, Mitsukuni Tsukihara, Junichi Murakami | 2006-11-21 |
| 6984833 | Ion implanter and method for controlling the same | Makoto Sano, Michiro Sugitani, Mitsukuni Tsukihara | 2006-01-10 |