Issued Patents All Time
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797968 | Ion beam processing method and apparatus therefor | Mitsukuni Tsukihara, Yoshitaka Amano, Michiro Sugitani, Hiroki Murooka, Hiroshi Matsushita | 2004-09-28 |
| 6794661 | Ion implantation apparatus capable of increasing beam current | Mitsukuni Tsukihara, Michiro Sugitani, Hiroki Murooka, Hiroshi Matsushita | 2004-09-21 |
| 6720563 | Ion implantation apparatus and ion implantation method | — | 2004-04-13 |
| 6635889 | Ion implantation apparatus suited for low energy ion implantation and tuning method for ion source system thereof | Mitsukuni Tsukihara, Yuji Takahashi, Michiro Sugitani | 2003-10-21 |
| 6573517 | Ion implantation apparatus | Michiro Sugitani, Mitsukuni Tsukihara, Yoshitomo Hidaka, Kouji Inada | 2003-06-03 |